微機電系統(MEMS)測試
京元電子可以使用具有成本效益的自製測試設備，提供同時測試多個積體電路的測試解決方案。京元電子可以測試各種不同類型的多模式微機電系統 (MEMS) 產品。到目前為止，京元電子已經成功測試的相關MEMS產品，包含：麥克風、陀螺儀、加速度感應器、電子羅盤、壓力感應器等等，並將在不久的將來為具有9自由度 (Degree of Freedom, DOF)、10自由度 (DOF) 功能和濕度/二氧化碳(CO2) 感應器的產品提供經濟高效的多模式測試解決方案。
我們提供完整系列的測試平台，以滿足各種微機電系統測試要求。測試平台詳如下表：
|
供 應 商 |
型 號 |
速 度 (MHz) |
| 京元電子自行研製之測試設備 | E320 | 100 MHz/200 MHz |
| SPEA | DOT100RM | 50 MHz |
京元電子針對IMU感應器的MEMS測試服務解決方案如下
|
IMU Test System |
|
|
|
|
|
Handler |
SPEA/H3580 |
SPEA/3560 |
HT200M |
KYEC/RD Design |
|
Tester |
DOTI00 |
DOTI00 |
E320 |
E320 |
|
Max Multi-sites |
49 sites |
32 sites |
36 sites |
80 sites |
| Handling | ||||
|
Input |
JEDEC Tray |
Bowl feeder (option) |
Bowl feeder |
Bowl feeder/Waffle Tray |
|
Output |
JEDEC Tray |
T&R (RSU200) |
T&R (All in one) |
T&R (All in one) |
|
Minimum package |
2x2 mm |
2x2 mm |
~1x1 mm |
~1x1 mm |
|
Vision lnspection |
No |
No |
5 sides (option) |
5 sides (option) |
| Motion Stimulus |
RTA 366 |
RTA 330 |
HT Gyro module |
KYE G1 |
| Range: Angle / Angular speed |
450° / ±400 deg/s |
-90° ~ 450° / ±500 deg /s |
-180° ~ +180° / ±200 deg/s |
-90° ~ 450° / ±500 deg/s |
| Accuracy: Rotation angle / Angular speed |
±0.01° / ± 0.05% of full speed |
±0.01° / ± 0.05% of full speed |
±0.05 / ± 0.3% deg/sec |
±0.01° / ± 0.1% of full speed |
|
Temperature range |
-40° ~ 150° |
Room |
Room |
Room |
| Capacity status |
Ready |
Ready in production |
Need to upgrade Gyro module |
Ready in production |
京元電子的MEMS壓力傳感器/氣壓計測試解決方案
| Pressure / Barometer |
|
|
|
|
|
Handler |
SPEA / H3580 |
KYEC / P_Series |
KYEC / PT_Series |
KYEC / PT++_Series |
|
Tester |
DOT100 |
E320 |
E320 |
E320ED |
|
Max. Multi-sites test in parallelism |
49 sites |
64 sites x 4 = 256 sites |
128 sites x 4 = 512 sites |
256 sites x 4 = 1024 sites |
|
Handling |
||||
|
Input |
JEDEC Tray |
Waffle Tray |
Waffle Tray |
Waffle Tray |
|
Output |
JEDEC Tray |
T&R (All in one) |
T&R (All in one) |
TBD |
|
Minimum package |
~2x2mm |
~1x1mm |
~1x1mm |
~1x1mm |
|
Vision Inspection |
No |
5 sides (option) |
5 sides (option) |
5 sides (option) |
|
Tester resource |
DOT100 / 16 slots |
E320 / 23x2 slots |
E320 / 23x4slots |
E320ED /26x4 slots |
|
PE card I/O channel |
768 channels |
1792 channels |
3584 channels |
7168 channels |
|
DPS (Direct power Supply) |
384 channels |
288 channels |
576 channels |
1152 channels |
|
Stimulus for Pressure |
TPSU |
K_CHV1 |
K_CHV2 |
K_CHV3 |
|
Working Range Pressure/Temperature |
30 ~ 400 kPa / -40 ~ 150℃ |
30 ~ 150 kPa / 10 ~ 90℃ |
10 ~ 130 kPa / -20 ~ 90℃ |
30 ~ 200 kPa / -10 ~ 90℃ |
|
Sensor Accuracy Pressure/Temperature |
0.005% of Full scale / ± 0.1℃ |
0.01% of Full scale / ± 0.1℃ |
0.005% of Full scale / ± 0.1℃ |
0.01% of Full scale / ± 0.1℃ |
|
Max. Chamber number |
3 chambers (Test ping pang by each chamber) |
4 chambers + 4 pre-heat chambers |
4 chambers (Test in parallelism for all chambers) |
4 chambers (Test in parallelism for all chamber) |
|
Status |
Ready for Production |
Ready in Production |
Ready in Production |
To be ready in Q3/2019 |
京元電子微機電系統產品(MEMS)測試工廠
台灣銅鑼廠從2014年第二季開始投產
京元電子專用MEMS測試平台
- 京元電子於2014年建造銅鑼廠並預留地下室用於測試MEMS傳感器
- 我們為傳感器測試準備測試環境做了很多努力。
- 測試產能正在迅速增長。
